Thin Film Preparation in UHV

Thin film preparation techniques are provided by the Network-Partners CreaTec, SPECS and Bestec. All companies are experts on Physical Vapour Deposition (PVD) techniques such as Molecular Beam Epitaxy (MBE), Sputtering and Pulsed Laser Deposition (PLD).

Together with surface analysis tools provided by SPECS and Surface Concept, the Network of Competence is able to offer a wide range of complete UHV-systems integrating preparation and analysis for in-situ investigations of various material classes.

Within this circle CreaTec is the dedicated MBE company which is able to supply customers worldwide with components such as effusion cells, manipulators, sample holders and RHEED systems as well as complete systems for the MBE growth of various materials on 1 to 4 inch substrates. The company is well known for its capability to design complex solutions according to customers' requirements (i.e. expansion and improvement of existing systems).

Complementing CreaTec's product range SPECS delivers state-of-the-art components for MBE such as e-beam evaporators, plasma sources and RHEED systems.

Together CreaTec and SPECS are able to provide high performance MBE equipment which is suitable for the epitaxial thin film preparation of almost all material classes.

Thin films can also be created by sputtering techniques. Within the Network of Competence Bestec is the expert for sputtering systems. Bestec manufactures PVD systems with complex sample handling and substrate sizes ranging from 1 to 8 inches.