SPECS GmbH
Voltastr. 5
13355 Berlin Germany
Phone: +49 30 467824-0
Fax: +49 30 4642083
E-mail: support@specs.de

SPECS is one of the leading manufacturers of systems and components for the HV, UHV, MBE, surface science and vacuum deposition community. SPECS surface analysis instrumentation is based on various methods like XPS, UPS, AES, SNMS, LEED, HREELS and STM. At the headquarters in Berlin the company designs and produces complete surface analysis systems like the ESCA system SAGE and the SNMS system INA-X.
Furthermore the company is well known for highly customised research systems with integrated facilities for in-situ sample preparation and analysis.
However, analysers, excitation sources, plasma- and e-beam based instruments are also available separately.

The hemispherical energy analyser PHOIBOS can be equipped with various detection systems, i.e. a 2D-CCD-imaging system, a spin-detector or a 48-channel detector.

By new licence, a Low Energy Electron Microscope (LEEM) has recently joined the SPECS product line. This sophisticated research instrument shows unsurpassed 5 nm resolution in dynamic LEEM experiments.